Check out our just-published work on high-rate deposition and characterization of CoZrO for on-chip power! This was a collaborative effort between our group, Alex Hanson, and Southwest Research Institute (SWRI), led by Ph.D. student Elaine Ng and supported by SWRI and a NSTGRO fellowship. We achieve 5x the previous growth rate of this material while furthering understanding of the materials properties needed for both high switching frequencies and back-end-of-the-line compatibility. We hope to see these materials used in future GPU data centers.
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